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IEICE Trans

Masaru ITO

Exhaustive and Systematic Accuracy Verification and Enhancement of STI Stress Compact Model for General Realistic Layout Patterns
Kenta YAMADA Toshiyuki SYO Hisao YOSHIMURA Masaru ITO Tatsuya KUNIKIYO Toshiki KANAMOTO Shigetaka KUMASHIRO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2010/08/01
Vol. E93-C  No. 8  pp. 1349-1358
Type of Manuscript:  PAPER
Category: Semiconductor Materials and Devices
Keyword: 
STI, stress, model, verification, enhancement, 
 Summary | Full Text:PDF