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Dynamic-Clustering and Grain-Growth Kinetics Effects on Dopant Diffusion in Polysilicon Masami HANE Shinya HASEGAWA | Publication: IEICE TRANSACTIONS on Electronics
Publication Date: 1994/02/25
Vol. E77-C
No. 2
pp. 112-117
Type of Manuscript:
Special Section PAPER (Special Issue on 1993 VLSI Process and Device Modeling Workshop (VPAD 93)) Category: Process Simulation Keyword: poly-silicon, diffusion, modeling, simulation, | | | Summary | Full Text:PDF | |
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