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IEICE Trans

Masaki MATSUSHITA

C-S Thin Films Formed by Plasma CVD
Masaki MATSUSHITA Md. Abul KASHEM Shinzo MORITA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2000/07/25
Vol. E83-C  No. 7  pp. 1134-1138
Type of Manuscript:  Special Section PAPER (Special Issue on Organic Molecular Electronics for the 21st Century)
Category: Thin Film
Keyword: 
C-S compound, plasma CVD, atomic composition, chemical mechanism, Ar-CH4-SF6, 
 Summary | Full Text:PDF