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IEICE Trans

Martin BORNER

An Ultra-Deep High-Q Microwave Cavity Resonator Fabricated Using Deep X-Ray Lithography
Zhen MA David M. KLYMYSHYN Sven ACHENBACH Martin BORNER Nina DAMBROWSKY Jurgen MOHR 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2007/12/01
Vol. E90-C  No. 12  pp. 2192-2197
Type of Manuscript:  Special Section PAPER (Special Section on Recent Technologies for Microwave and Millimeter-wave Passive Devices)
Category: 
Keyword: 
cavity resonators, micromachining, RF MEMS, X-ray lithography, high Q, 
 Summary | Full Text:PDF