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IEICE Trans

Kouji NUMADA

Fabrication of SiN Films by Double Tubed Coaxial Line Type Microwave Plasma Chemical Vapor Deposition
Yukihiro KIYOTA Kouji NUMADA Isamu KATO 
Publication:   IEICE TRANSACTIONS (1976-1990)
Publication Date: 1987/04/25
Vol. E70-E  No. 4  pp. 334-335
Type of Manuscript:  Special Section LETTER (Special Issue: Papers from 1987 National Convention IEICE)
Category: Components and Materials
Keyword: 
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