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IEICE Trans

Koji KAMODA

Development of an Enterprise-Wide Yield Management System Using Critical Area Analysis for High-Product-Mix Semiconductor Manufacturing
Yuichi HAMAMURA Chizu MATSUMOTO Yoshiyuki TSUNODA Koji KAMODA Yoshio IWATA Kenji KANAMITSU Daisuke FUJIKI Fujihiko KOJIKA Hiromi FUJITA Yasuo NAKAGAWA Shun'ichi KANEKO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2009/01/01
Vol. E92-C  No. 1  pp. 144-152
Type of Manuscript:  PAPER
Category: Semiconductor Materials and Devices
Keyword: 
defects, failure analysis, yield estimation, integrated circuit layout, simulation, 
 Summary | Full Text:PDF