Publication: IEICE TRANSACTIONS on Electronics
Publication Date: 2003/06/01
Vol. E86-C
No. 6
pp. 885-890
Type of Manuscript:
Special Section PAPER (Special Issue on Recent Development of Electro-Mechanical Devices (IS-EMD 2002)) Category: Contact Phenomena Keyword: silicone vapor, micro-motor, contamination, reliability, SiO2, |