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IEICE Trans

Kiyoshi NIKAWA

New Approach of Laser-SQUID Microscopy to LSI Failure Analysis
Kiyoshi NIKAWA Shouji INOUE Tatsuoki NAGAISHI Toru MATSUMOTO Katsuyoshi MIURA Koji NAKAMAE 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2009/03/01
Vol. E92-C  No. 3  pp. 327-333
Type of Manuscript:  INVITED PAPER (Special Section on Recent Progress in Superconducting Analog Devices and Their Applications)
Category: 
Keyword: 
SQUID, laser, LSI chip, failure analysis, defect localization, 
 Summary | Full Text:PDF
Laser-SQUID Microscopy as a Novel Tool for Inspection, Monitoring and Analysis of LSI-Chip-Defects: Nondestructive and Non-electrical-contact Technique
Kiyoshi NIKAWA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2002/03/01
Vol. E85-C  No. 3  pp. 746-751
Type of Manuscript:  INVITED PAPER (Special Issue on Superconductive Electronics)
Category: Instruments and Coolers
Keyword: 
high Tc DC-SQUID, optical beam induced current, photo current, high spatial resolution, electrical defects, inspection, failure analysis, 
 Summary | Full Text:PDF
Highly Sensitive OBIRCH System for Fault Localization and Defect Detection
Kiyoshi NIKAWA Shoji INOUE 
Publication:   IEICE TRANSACTIONS on Information and Systems
Publication Date: 1998/07/25
Vol. E81-D  No. 7  pp. 743-748
Type of Manuscript:  Special Section PAPER (Special Issue on Test and Diagnosis of VLSI)
Category: Beam Testing/Diagnosis
Keyword: 
VLSI chip, fault localization, metal line defect detection, high resistivity, TiSi, Al, reliability, yield, failure analysis, 
 Summary | Full Text:PDF
Failure Analysis in Si Device Chips
Kiyoshi NIKAWA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1994/04/25
Vol. E77-C  No. 4  pp. 528-534
Type of Manuscript:  INVITED PAPER (Special Issue on LSI Failure Analysis)
Category: 
Keyword: 
EMMS (emission microscopy), OBIC (optical beam induced current), LCM (liquid crystal method), EBP (electron beam probing), FIB (focused ion beam method), expert systems, computer aided fault localization tools, 
 Summary | Full Text:PDF
Focused Ion Beam Applications to Failure Analysis of Si Device Chip
Kiyoshi NIKAWA 
Publication:   IEICE TRANSACTIONS on Fundamentals of Electronics, Communications and Computer Sciences
Publication Date: 1994/01/25
Vol. E77-A  No. 1  pp. 174-179
Type of Manuscript:  Special Section PAPER (Special Section on Reliability)
Category: Failure Physics and Failure Analysis
Keyword: 
focused ion beam (FIB), scanning ion microscope (SIM), scanning electron microscope (SEM), transmission electron microscope (TEM), electron beam probing (EBP), microscopic cross-sectioning and observation, microscopic crosssectioning and elemental analysis, aluminum film microstructure observation, 
 Summary | Full Text:PDF