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IEICE Trans

Kikuo OKUYAMA

Control of Fine Particulate and Gaseous Contaminants by UV/Photoelectron Method
Takafumi SETO Shin YOKOYAMA Kikuo OKUYAMA Masataka HIROSE Toshiaki FUJII Hidetomo SUZUKI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1996/03/25
Vol. E79-C  No. 3  pp. 306-311
Type of Manuscript:  Special Section PAPER (Special Issue on Scientific ULSI Manufacturing Technology)
Category: Particle/Defect Control and Analysis
Keyword: 
contamination control, MOS device, fine particle, ultraviolet, photoelectron, 
 Summary | Full Text:PDF