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IEICE Trans

Kenji NOMA

Deposition of Ba Ferrite Films for Perpendicular Magnetic Recording Media Using Mixed Sputtering Gas of Xe, Ar and O2
Nobuhiro MATSUSHITA Kenji NOMA Shigeki NAKAGAWA Masahiko NAOE 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1995/11/25
Vol. E78-C  No. 11  pp. 1562-1566
Type of Manuscript:  Special Section PAPER (Special Issue on Ultra High Density Information Storage Technologies)
Category: 
Keyword: 
Ba ferrite films, Xe mixed sputtering gas, facing targets sputtering apparatus, ZnO underlayer, spinel intergrown BaM ferrite, 
 Summary | Full Text:PDF