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IEICE Trans

Kenji HORIBATA

Capacitive Pressure Sensor with Center Clamped Diaphragm
Toshihiko OMI Kenji HORIBATA Fumihiko SATO Masashi TAKEUCHI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1997/02/25
Vol. E80-C  No. 2  pp. 263-268
Type of Manuscript:  Special Section PAPER (Special Issue on Micromachine Technology)
Category: Sensor
Keyword: 
capacitance, pressure sensor, linearity, diaphragm, micromachining, 
 Summary | Full Text:PDF