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IEICE Trans

Kazuyuki MINAMI

Temperature Compensated Piezoresistor Fabricated by High Energy Ion Implantation
Takahiro NISHIMOTO Shuichi SHOJI Kazuyuki MINAMI Masayoshi ESASHI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1995/02/25
Vol. E78-C  No. 2  pp. 152-156
Type of Manuscript:  Special Section PAPER (Special Issue on Micromachines and Micro Electro Mechanical Systems)
Category: 
Keyword: 
piezoresistor, ion implantation, temperature compensation, JFET, 
 Summary | Full Text:PDF