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IEICE Trans

Kazuhiko OKADA

A Test Structure to Analyze Highly-Doped-Drain and Lightly-Doped-Drain in CMOSFET
Takashi OHZONE Kazuhiko OKADA Takayuki MORISHITA Kiyotaka KOMOKU Toshihiro MATSUDA Hideyuki IWATA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2006/09/01
Vol. E89-C  No. 9  pp. 1351-1357
Type of Manuscript:  PAPER
Category: Semiconductor Materials and Devices
Keyword: 
CMOSFET, LDD-type, source/drain-resistance, sheet resistance, 
 Summary | Full Text:PDF