Publication: IEICE TRANSACTIONS on Electronics
Publication Date: 1998/04/25
Vol. E81-C
No. 4
pp. 528-536
Type of Manuscript:
Special Section PAPER (Special Issue on Advanced Memory Devices Using High-Dielectric-Constant and Ferroelectric Thin Films) Category: Keyword: PZT, sol-gel, IrO2, Zr/Ti ratio, reliability, |