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IEICE Trans

Kanji YASUI

Hydrogen Plasma Annealing of ZnO Films Deposited by Magnetron Sputtering with Third Electrode
Kanji YASUI Yutaka OOSHIMA Yuichiro KUROKI Hiroshi NISHIYAMA Masasuke TAKATA Tadashi AKAHANE 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2009/12/01
Vol. E92-C  No. 12  pp. 1438-1442
Type of Manuscript:  Special Section PAPER (Special Section on Nanomaterials and Nanodevices for Nanoscience and Nanotechnology)
Category: Nanomaterials and Nanostructures
Keyword: 
sputtering, mesh electrode, zinc oxide, plasma annealing, 
 Summary | Full Text:PDF