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IEICE Trans

Iwao NATORI

Plasma-Parameter-Extraction for Minimizing Contamination and Damage in RIE Processes
Takeo YAMASHITA Satoshi HASAKA Iwao NATORI Tadahiro OHMI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1992/07/25
Vol. E75-C  No. 7  pp. 839-843
Type of Manuscript:  Special Section PAPER (Special Issue on Ultra Clean Technology)
Category: 
Keyword: 
ion energy, ion flux, contamination, ion energy-flux parameter map, 
 Summary | Full Text:PDF