Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 56

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 203

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 203

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 203

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 203

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 203

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 212

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 276

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 276

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 276

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 276

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 276

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 304

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 323
IEICE Trans

Hitoshi MORINAGA

A Model for the Electrochemical Deposition and Removal of Metallic Impurities on Si Surfaces
Hitoshi MORINAGA Makoto SUYAMA Masashi NOSE Steven VERHAVERBEKE Tadahiro OHMI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1996/03/25
Vol. E79-C  No. 3  pp. 343-362
Type of Manuscript:  Special Section PAPER (Special Issue on Scientific ULSI Manufacturing Technology)
Category: High-Performance Processing
Keyword: 
metallic impurities, metal-induced pits, redox poten-tial, surfactant, chelating agent, 
 Summary | Full Text:PDF