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IEICE Trans

Hitoshi INABA

Neutralization of Static Electricity by Soft X-Ray and Vacuum Ultraviolet(UV)-Ray Irradiation
Hitoshi INABA Tadahiro OHMI Takanori YOSHIDA Takao OKADA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1996/03/25
Vol. E79-C  No. 3  pp. 328-336
Type of Manuscript:  Special Section PAPER (Special Issue on Scientific ULSI Manufacturing Technology)
Category: Particle/Defect Control and Analysis
Keyword: 
ionizer, neutralization, ionization, soft X-rays, vac-uum UV rays, 
 Summary | Full Text:PDF