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IEICE Trans

Hiromichi TANI

A New Cost Model, CPO, for the Evaluation of FAB Performance
Yukiko ITO Hajime OGAWA Hiromichi TANI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1996/03/25
Vol. E79-C  No. 3  pp. 301-305
Type of Manuscript:  Special Section PAPER (Special Issue on Scientific ULSI Manufacturing Technology)
Category: CIM/CAM
Keyword: 
cost performance, cost of equipment ownership, cost of process ownership, wafer cost, 
 Summary | Full Text:PDF