Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2008/10/01 Vol. E91-CNo. 10pp. 1644-1648 Type of Manuscript: Special Section PAPER (Special Section on Functional Thin Films for Optical Applications) Category: Keyword: oblique deposition, SiO2 film, reactive sputtering, high-rate deposition, alignment layer,
Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2008/10/01 Vol. E91-CNo. 10pp. 1658-1662 Type of Manuscript: Special Section PAPER (Special Section on Functional Thin Films for Optical Applications) Category: Keyword: facing-target sputtering, indium tin oxide, low damage, organic layer, shield, γ-electrons,