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IEICE Trans

David WILSON

The Application of DOE and RSM Techniques for Wafer Mapping in IC Technology
Anthony J. WALTON Martin FALLON David WILSON 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1996/02/25
Vol. E79-C  No. 2  pp. 219-225
Type of Manuscript:  Special Section PAPER (Special Issue on Microelectronic Test Structures)
Category: Statistical Analysis
Keyword: 
DOE, RSM, wafer mapping, test structures, integrated circuits, 
 Summary | Full Text:PDF