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IEICE Trans

Daisuke NOTSU

Fabrication of 100 nm Width Fine Active-Region Using LOCOS Isolation
Daisuke NOTSU Naoya IKECHI Yasuyuki AOKI Nobuyuki KAWAKAMI Kentaro SHIBAHARA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2002/05/01
Vol. E85-C  No. 5  pp. 1119-1124
Type of Manuscript:  Special Section PAPER (Special Issue on Advanced Sub-0.1 µm CMOS Devices)
Category: 
Keyword: 
LOCOS, junction leakage current, PSL, isolation, bird's beak, 
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