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IEICE Trans

Daisuke FUKUDA

Modeling the Effect of Global Layout Pattern on Wire Width Variation for On-the-Fly Etching Process Modification
Daisuke FUKUDA Kenichi WATANABE Yuji KANAZAWA Masanori HASHIMOTO 
Publication:   IEICE TRANSACTIONS on Fundamentals of Electronics, Communications and Computer Sciences
Publication Date: 2015/07/01
Vol. E98-A  No. 7  pp. 1467-1474
Type of Manuscript:  Special Section PAPER (Special Section on Design Methodologies for System on a Chip)
Category: 
Keyword: 
etching, manufacturability, modeling variability, 
 Summary | Full Text:PDF
Edge-over-Erosion Error Prediction Method Based on Multi-Level Machine Learning Algorithm
Daisuke FUKUDA Kenichi WATANABE Naoki IDANI Yuji KANAZAWA Masanori HASHIMOTO 
Publication:   IEICE TRANSACTIONS on Fundamentals of Electronics, Communications and Computer Sciences
Publication Date: 2014/12/01
Vol. E97-A  No. 12  pp. 2373-2382
Type of Manuscript:  Special Section PAPER (Special Section on VLSI Design and CAD Algorithms)
Category: Device and Circuit Modeling and Analysis
Keyword: 
Edge-over-Erosion, CMP, manufacturability, machine learning, 
 Summary | Full Text:PDF