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IEICE Trans

Dae-Hee KIM

Interaction of Bis-diethylaminosilane with a Hydroxylized Si (001) Surface for SiO2 Thin-Film Growth Using Density Functional Theory
Seung-Bin BAEK Dae-Hee KIM Yeong-Cheol KIM 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2011/05/01
Vol. E94-C  No. 5  pp. 771-774
Type of Manuscript:  Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices)
Category: 
Keyword: 
atomic layer deposition, Bis-diethylaminosilane, density functional theory, SiO2, 
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