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IEICE Trans

Christian MAUL

The 3D Measurement and Analysis of High Precision Surfaces Using Con-Focal Optical Methods
John McBRIDE Christian MAUL 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2004/08/01
Vol. E87-C  No. 8  pp. 1261-1267
Type of Manuscript:  INVITED PAPER (Special Section on IS-EMD2003--Recent Technical Trend of Electro-Mechanical Devices)
Category: 
Keyword: 
3D surface scanning, micro-metrology, MEMS, contact erosion, con-focal methods, 
 Summary | Full Text:PDF