Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 56

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 203

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 203

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 203

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 203

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 203

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 203

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 212

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 276

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 276

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 276

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 276

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 276

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 304

Warning: Undefined array key "abst" in /var/www/02search_html/bin/author.php on line 323
IEICE Trans

Chisato IWASAKI

Improvement of PECVD-SiNx for TFT Gate Insulator by Controlling Ion Bombardment Energy
Yasuhiko KASAMA Tadahiro OHMI Koichi FUKUDA Hirobumi FUKUI Chisato IWASAKI Shoichi ONO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1996/03/25
Vol. E79-C  No. 3  pp. 398-406
Type of Manuscript:  Special Section PAPER (Special Issue on Scientific ULSI Manufacturing Technology)
Category: Device Issues
Keyword: 
TFT, gate insulator, PECVD, ion flux, ion energy, 
 Summary | Full Text:PDF