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IEICE Trans

Cheol-Hong KIM

High Performance Lithography with Advanced Modified Illumination
Ho-Young KANG Cheol-Hong KIM Joong-Hyun LEE Woo-Sung HAN Young-Bum KOH 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1994/03/25
Vol. E77-C  No. 3  pp. 432-437
Type of Manuscript:  Special Section PAPER (Special Issue on Quarter Micron Si Device and Process Technologies)
Category: Process Technology
Keyword: 
memory technologies, photolithography, optics, illumination, resolution, 
 Summary | Full Text:PDF