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IEICE Trans

Brian W. SHELDON

In Situ Fiber Optical Sensor for the Measurement of Thin Films
Yifei HE Brian W. SHELDON Theodore F. MORSE 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2000/03/25
Vol. E83-C  No. 3  pp. 315-325
Type of Manuscript:  Special Section PAPER (Special Issue on Optical Fiber Sensors)
Category: Physical and Mechanical Sensors
Keyword: 
optical fiber sensor, in situ measurement, refractive index, surface roughness, film thickness, 
 Summary | Full Text:PDF