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Thermal Stability of W2N Compound Barrier in W/W2N/poly-Si Gate Electrode Configuration
Atsushi NOYA Mayumi B. TAKEYAMA | Publication: IEICE TRANSACTIONS on Electronics
Publication Date: 2003/11/01
Vol. E86-C
No. 11
pp. 2332-2335
Type of Manuscript:
LETTER
Category: Electronic Materials
Keyword:
metallization, MOS, gate electrode, WNx, | | | Summary | Full Text:PDF | |
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An Auger Electron Spectroscopy Study on the Anodization Process of High-Quality Thin-Film Capacitors Made of Hafnium
Atsushi NOYA Katsutaka SASAKI Toshiji UMEZAWA | Publication: IEICE TRANSACTIONS (1976-1990)
Publication Date: 1989/12/25
Vol. E72-E
No. 12
pp. 1453-1458
Type of Manuscript:
PAPER
Category: Materials
Keyword:
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Superconducting Y-Ba-Cu Oxide Films as-Grown by RF Diode Sputtering
Mikihiro WATANABE Atsushi MATACHI Teruo ISHIBASHI Atsushi NOYA Shinya KURIKI | Publication: IEICE TRANSACTIONS (1976-1990)
Publication Date: 1988/04/25
Vol. E71-E
No. 4
pp. 283-285
Type of Manuscript:
Special Section LETTER (Special Issue: Papers from 1988 Spring Convention IEICE)
Category: Superconductivity Electronics
Keyword:
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An AES Study on the Anodization of Al/Mo/Al Multilayer Films
Atsushi NOYA Katsutaka SASAKI Toshiji UMEZAWA Tsuyoshi DOBASHI | Publication: IEICE TRANSACTIONS (1976-1990)
Publication Date: 1988/04/25
Vol. E71-E
No. 4
pp. 266-267
Type of Manuscript:
Special Section LETTER (Special Issue: Papers from 1988 Spring Convention IEICE)
Category: Components and Materials
Keyword:
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