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IEICE Trans

Atsuki ONO

A 100 nm Node CMOS Technology for System-on-a-Chip Applications
Kiyotaka IMAI Atsuki ONO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2002/05/01
Vol. E85-C  No. 5  pp. 1057-1063
Type of Manuscript:  INVITED PAPER (Special Issue on Advanced Sub-0.1 µm CMOS Devices)
Category: 
Keyword: 
CMOS, threshold voltage, gate leakage current, oxynitride, 
 Summary | Full Text:PDF