A 16.7 Mfps, 312 kPixel Backside-Illuminated Ultrahigh-Speed CCD Image Sensor with a Sensitivity 12.7 Times Higher than That with Front-Side Illuminated Structure

Toshiki ARAI   Jun YONAI   Tetsuya HAYASHIDA   Hiroshi OHTAKE   Harry van KUIJK   Takeharu Goji ETOH   

C - Abstracts of IEICE TRANSACTIONS on Electronics (Japanese Edition)   Vol.J96-C   No.7   pp.180-190
Publication Date: 2013/07/01
Online ISSN: 1881-0217
Print ISSN: 1345-2827
Type of Manuscript: PAPER
ultrahigh-speed ,  CCD ,  ISIS ,  BSI ,  16.7 Mfps ,  high sensitivity ,  

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We have developed a 16.7 Mfps, 312 kpixel BSI ultrahigh-speed CCD with a sensitivity 12.7 times higher than that with a front-side illumination. The increased sensitivity was achieved with an optical and a time aperture ratio of 100%, and by increasing the optical utilization ratio. The ultrahigh-speed shooting was made possible by an in-situ storage image sensor. The increased maximum frame rate was achieved by reducing the resistance of the wiring and by dividing the image area. The product of the pixel count of 312,360 and maximum frame rate of 16.7 million is the highest performance in high-speed imaging devices.