Well-Shaped Microelectrode Array Structure for High-Density CMOS Amperometric Electrochemical Sensor Array

Kiichi NIITSU  Tsuyoshi KUNO  Masayuki TAKIHI  Kazuo NAKAZATO  

IEICE TRANSACTIONS on Electronics   Vol.E99-C   No.6   pp.663-666
Publication Date: 2016/06/01
Online ISSN: 1745-1353
DOI: 10.1587/transele.E99.C.663
Type of Manuscript: BRIEF PAPER
MEA,  CMOS,  analog circuit,  amperometry,  electrochemical sensor,  3D structure,  

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In this study, a well-shaped microelectrode array (MEA) for fabricating a high-density complementary metal-oxide semiconductor amperometric electrochemical sensor array was designed and verified. By integrating an auxiliary electrode with the well-shaped structure of the MEA, the footprint was reduced and high density and high resolution were also achieved. The results of three-dimensional electrochemical simulations confirmed the effectiveness of the proposed MEA structure and possibility of increasing the density to four times than that achieved by the conventional two-dimensional structure.