Structure Transformation of Bended Diamond-Like Carbon Free-Space Nanowiring by Ga Focused-Ion-Beam Irradiation

Ken-ichiro NAKAMATSU  Shinji MATSUI  

IEICE TRANSACTIONS on Electronics   Vol.E99-C    No.3    pp.365-370
Publication Date: 2016/03/01
Online ISSN: 1745-1353
DOI: 10.1587/transele.E99.C.365
Type of Manuscript: Special Section PAPER (Special Section on Progress towards System Nanotechnology)
focused-ion-beam,  CVD,  DLC,  nanowiring,  

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We observed Ga focused-ion-beam (FIB) irradiation effect onto diamond-like carbon (DLC) free-space nanowiring (FSW) fabricated by focused-ion-beam chemical vapor deposition (FIB-CVD). A bended FIB-CVD FSW completely strained after Ga-FIB irradiation with raster scanning. This is probably caused by generation of compression stresses onto the surface of FSW, because the surface state of the nanowire changed with Ga-FIB irradiation. Transmission electron microscope (TEM) study indicates that Ga of FSW core part disappeared after Ga-FIB irradiation and a near-edge X-ray absorption fine structure (NEXAFS) analysis revealed C-Ga bond formation onto the surface. This is attributed to a movement of Ga from the core region to the surface, and/or an adsorption of Ga onto the surface by Ga-FIB scanned irradiation. The transformation of FSW is not only fascinating as physical phenomenon, but also effective for fabricating various 3-dimensional nanodevices equipped with nanowires utilized as electric wiring.