For Full-Text PDF, please login, if you are a member of IEICE,|
or go to Pay Per View on menu list, if you are a nonmember of IEICE.
Recent Situation of the UV Imprint Lithography and Its Application to the Photonics Devices
IEICE TRANSACTIONS on Electronics
Publication Date: 2016/03/01
Online ISSN: 1745-1353
Type of Manuscript: INVITED PAPER (Special Section on Progress towards System Nanotechnology)
UV-imprint lithography, PDMS, LN filter, dry etching, sapphire substrate, alumina nanohole,
Full Text: FreePDF(1.2MB)
The individual steps of UV imprint lithography have been explained in detail from the points of manufacturing nano-structures. The applications to photonic devices have been also introduced.