Resonant Power Supply Noise Reduction by STO Capacitors Fabricated on Interposer

Toru NAKURA  Masahiro KANO  Masamitsu YOSHIZAWA  Atsunori HATTORI  Kunihiro ASADA  

IEICE TRANSACTIONS on Electronics   Vol.E98-C   No.7   pp.734-740
Publication Date: 2015/07/01
Online ISSN: 1745-1353
DOI: 10.1587/transele.E98.C.734
Type of Manuscript: PAPER
Category: Electronic Circuits
resonant power supply noise,  power integrity,  embedded capacitor,  STO capacitor,  

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This paper demonstrates the resonant power supply noise reduction effects of STO thin film decoupling capacitors, which are embedded in interposers. The on-interposer STO capacitor consists of SrTiO2 whose dielectric constant is about 20 and is sandwitched by Cu films in an interposer. The on-interposer STO capacitors are directly connected to the LSI PADs so that they provide large decoupling capacitance without package leadframe/bonding wire inductance, resulting in the reduction of the resonant power supply noise. The measured power supply waveforms show significant reduction of the power supply noise, and the Shmoo plots also show the contribution of the STO capacitors to the robust operations of LSIs.