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Capacitance Sensor of Frequency Modulation for Integrated Touchpanels Using Amorphous In-Sn-Zn-O Thin-Film Transistors
Yuki KOGA Tokiyoshi MATSUDA Mutsumi KIMURA Dapeng WANG Mamoru FURUTA Masashi KASAMI Shigekazu TOMAI Koki YANO
IEICE TRANSACTIONS on Electronics
Publication Date: 2015/11/01
Online ISSN: 1745-1353
Type of Manuscript: BRIEF PAPER
capacitance sensor, frequency modulation, integrated touchpanel, amorphous In-Sn-Zn-O (α-ITZO), thin-film transistor (TFT),
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We have developed a capacitance sensor of frequency modulation for integrated touchpanels using amorphous In-Sn-Zn-O (α-ITZO) thin-film transistors (TFTs). This capacitance sensor consists of a ring oscillator, whose one stage is replaced by a reset transistor, sensing transistor, and sensing electrode. The sensing electrode is prepared as one terminal to form a sensing capacitor when the other terminal is added by a finger. The ring oscillator consists of pseudo CMOS inverters. We confirm that the oscillation frequency changes when the other terminal is added. This result suggests that this capacitance sensor can be applied to integrated touchpanels on flatpanel displays.