Al-Based Metal Mesh Electrodes for Advanced Touch Screen Panels Using Aluminum Nitride System Optical Absorption Layer

Mototaka OCHI  Yoko SHIDA  Hiroyuki OKUNO  Hiroshi GOTO  Toshihiro KUGIMIYA  Moriyoshi KANAMARU  

IEICE TRANSACTIONS on Electronics   Vol.E98-C   No.11   pp.1000-1007
Publication Date: 2015/11/01
Online ISSN: 1745-1353
DOI: 10.1587/transele.E98.C.1000
Type of Manuscript: INVITED PAPER (Special Section on Electronic Displays)
touch screen panel,  metal mesh electrode,  projected capacitive,  invisible,  etching property,  

Full Text: FreePDF(3.2MB)

An Al-N system optical absorption layer has been developed, to be used for Al-based metal mesh electrodes on touch screen panels. The triple-layered electrode effectively suppresses the optical reflection in both visible light and the blue color region and exhibits excellent wet etching property that accommodates micro-fabrication. Due to its high noise immunity and contact sensitivity originating from its low electrical resistivity, the proposed metal mesh electrodes are useful for touch-sensitive panels in the next generation ultra-high-resolution displays.