Development of Low Loss Ultra-High Δ ZrO2-SiO2 PLC for Next Generation Compact and High-Density Integrated Devices

Masanori TAKAHASHI  Yasuyoshi UCHIDA  Shintaro YAMASAKI  Junichi HASEGAWA  Takeshi YAGI  

IEICE TRANSACTIONS on Electronics   Vol.E97-C   No.7   pp.725-730
Publication Date: 2014/07/01
Online ISSN: 1745-1353
DOI: 10.1587/transele.E97.C.725
Type of Manuscript: INVITED PAPER (Special Section on Opto-electronics and Communications for Future Optical Network)
integrated optics,  MMI coupler,  optical communication,  optical device,  planar lightwave circuit,  

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For next generation planar lightwave circuit (PLC) devices, high function and high-density integration are required as well as downsizing and cost reduction. To realize these needs, high refractive index difference between a core and a clad (Δ) is required. To use PLC for practical applications, silica-based PLC is one of the most attractive candidate. However, degradation of the optical properties and productivity occur when Δ of the core becomes high. Thus, Δ of most of the conventional PLC with GeO2-SiO2 core is designed less than 2.5%. In this paper, we report a silica-based ultra-high Δ PLC with ZrO2-SiO2 core. 5.5%-Δ ZrO2-SiO2 PLC has been realized with low propagation loss and basic characteristics has been confirmed. Potential of chip size reduction of the ZrO2-SiO2 PLC is shown.