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Introduction of Yield Quadrant and Yield Capability Index for VLSI Manufacturing Junichi HIRASE Publication IEICE TRANSACTIONS on Electronics Vol.E97-C No.6 pp.609-618 Publication Date: 2014/06/01 Online ISSN: 1745-1353 DOI: 10.1587/transele.E97.C.609 Type of Manuscript: PAPER Category: Semiconductor Materials and Devices Keyword: yield, cluster parameter, systematic yield, yield quadrant, yield capability index, Full Text: PDF>>
Summary: Yield enhancements and quality improvements must be considered as factors of the utmost importance in VLSI (Very Large Scale Integration circuits) manufacturing in order to reduce cost and ensure customer satisfaction. This paper will present a study of the yield theory, an analysis of actual manufacturing data, and the challenges of yield enhancement. | |||||
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