Introduction of Yield Quadrant and Yield Capability Index for VLSI Manufacturing

Junichi HIRASE  

Publication
IEICE TRANSACTIONS on Electronics   Vol.E97-C   No.6   pp.609-618
Publication Date: 2014/06/01
Online ISSN: 1745-1353
DOI: 10.1587/transele.E97.C.609
Type of Manuscript: PAPER
Category: Semiconductor Materials and Devices
Keyword: 
yield,  cluster parameter,  systematic yield,  yield quadrant,  yield capability index,  

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Summary: 
Yield enhancements and quality improvements must be considered as factors of the utmost importance in VLSI (Very Large Scale Integration circuits) manufacturing in order to reduce cost and ensure customer satisfaction. This paper will present a study of the yield theory, an analysis of actual manufacturing data, and the challenges of yield enhancement.