Investigation of Roll-to-Sheet Imprinting for the Fabrication of Thin-film Transistor Electrodes

Hiroaki KOYAMA
Kazuhiro FUKADA
Yoshitaka MURAKAMI
Satoshi INOUE
Tatsuya SHIMODA

Publication
IEICE TRANSACTIONS on Electronics   Vol.E97-C    No.11    pp.1042-1047
Publication Date: 2014/11/01
Online ISSN: 1745-1353
DOI: 10.1587/transele.E97.C.1042
Type of Manuscript: Special Section INVITED PAPER (Special Section on Electronic Displays)
Category: 
Keyword: 
Nano-rheology Printing,  Oxide TFT,  Printed Electronics,  Printed TFT,  

Full Text: FreePDF

Summary: 
We applied a roll-to-sheet imprinting process to a large-scale substrate. Patterned ruthenium oxide (RuO2) electrodes were fabricated on both glass and flexible substrates. The resistivity of the electrodes on a glass substrate was 3.5 × 10-5 Ω cm, which indicates that this technique is useful for the fabrication of thin-film transistor (TFT) electrodes.