A Structured Routing Architecture for Practical Application of Character Projection Method in Electron-Beam Direct Writing

Rimon IKENO  Takashi MARUYAMA  Satoshi KOMATSU  Tetsuya IIZUKA  Makoto IKEDA  Kunihiro ASADA  

Publication
IEICE TRANSACTIONS on Fundamentals of Electronics, Communications and Computer Sciences   Vol.E97-A   No.8   pp.1688-1698
Publication Date: 2014/08/01
Online ISSN: 1745-1337
DOI: 10.1587/transfun.E97.A.1688
Type of Manuscript: PAPER
Category: VLSI Design Technology and CAD
Keyword: 
Electron Beam Direct Writing,  Character Projection,  routing,  interconnect,  VIA,  

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Summary: 
To improve throughput of Electron Beam Direct Writing (EBDW) with Character Projection (CP) method, a structured routing architecture (SRA) has been proposed to restrict VIA placement and wire-track transition. It reduces possible layout patterns in the interconnect layers, and increases VIA and metal figure numbers in the EB shots while suppressing the CP character number explosion. In this paper, we discuss details of the SRA design methodology, and demonstrate the CP performance by SRA in comparison with other EBDW techniques. Our experimental results show viable CP performance for practical use, and prove SRA's feasibility in 14nm mass fabrication.