Crosstalk Analysis and Measurement Technique for High Frequency Signal Transfer in MEMs Probe Pins

Duc Long LUONG  Hyeonju BAE  Wansoo NAH  

IEICE TRANSACTIONS on Electronics   Vol.E95-C    No.9    pp.1459-1464
Publication Date: 2012/09/01
Online ISSN: 1745-1353
DOI: 10.1587/transele.E95.C.1459
Print ISSN: 0916-8516
Type of Manuscript: Special Section PAPER (Special Section on Recent Development of Electro-Mechanical Devices - Papers selected from International Session on Electro-Mechanical Devices 2011 (IS-EMD2011) and other recent research results -)
MEMs,  parameter extraction,  crosstalk,  renormalization algorithm,  4 port VNA,  

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This paper develops a methodology of crosstalk analysis/measurement techniques for the design and fabrication of the MEMs (Micro-ElectroMichanical system) probe card. By introducing more ground pins into the connector pins, the crosstalk characteristics can be enhanced and a design guide for the parameters, such as pin's size and pitch is proposed to satisfy the given crosstalk limitation of -30 dB for reliable high speed signal transfer. The paper also presents a novel method to characterize scattering parameters of multiport interconnect circuits with a 4-port VNA (Vector Network Analyzer). By employing the re-normalization of scattering matrices with different reference impedances at other ports, data obtained from 4-port configuration measurements can be synthesized to build a full scattering matrix of the DUT (Device-Under-Test, MEMs probe connector pins). In comparison to the conventional 2-port VNA re-normalization method, proposed technique has two advantages: saving of measuring time, and enhanced accuracy even with open-ended unmeasured ports. A good agreement of the estimated and correct S parameters verifies the validness of the proposed algorithm.