Evaluation of L-2L De-Embedding Method Considering Misalignment of Contact Position for Millimeter-Wave CMOS Circuit Design

Qinghong BU  Ning LI  Kenichi OKADA  Akira MATSUZAWA  

IEICE TRANSACTIONS on Electronics   Vol.E95-C    No.5    pp.942-948
Publication Date: 2012/05/01
Online ISSN: 1745-1353
DOI: 10.1587/transele.E95.C.942
Print ISSN: 0916-8516
Type of Manuscript: PAPER
Category: Microwaves, Millimeter-Waves
misalignment,  de-embedding,  millimeter wave,  L-2L,  

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This paper presents the evaluation of the L-2L de-embedding method with misalignment of the contact position. The issues of misalignment of the contact position are investigated. The analysis of misalignment in the L-2L de-embedding procedure is performed. Two comparisons are carried out to verify the error of the L-2L de-embedding method. The calculation percent error in quality factor of the transmission line becomes up to 9.0%, while the transistor S-parameter error percentage becomes up to 21% at 60 GHz in the experimental results. The results show that the measurement errors, caused by the misalignment of the contact position, should be considered carefully.