Novel Three Dimensional (3D) NAND Flash Memory Array Having Tied Bit-line and Ground Select Transistor (TiGer)

Se Hwan PARK  Yoon KIM  Wandong KIM  Joo Yun SEO  Hyungjin KIM  Byung-Gook PARK  

IEICE TRANSACTIONS on Electronics   Vol.E95-C   No.5   pp.837-841
Publication Date: 2012/05/01
Online ISSN: 1745-1353
DOI: 10.1587/transele.E95.C.837
Print ISSN: 0916-8516
Type of Manuscript: Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices)
3 dimensional NAND flash memory,  operation scheme,  program inhibition,  

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We propose a new three-dimensional (3D) NAND flash memory array having Tied Bit-line and Ground Select Transistor (TiGer) [1]. Channels are stacked in the vertical direction to increase the memory density without the device size scaling. To distinguish stacked channels, a novel operation scheme is introduced instead of adding supplementary control gates. The stacked layers are selected by using ground select line (GSL) and common source line (CSL). Device structure and fabrication process are described. Operation scheme and simulation results for program inhibition are also discussed.