Color Filter Based on Surface Plasmon Resonance Utilizing Sub-Micron Periodic Hole Array in Aluminum Thin Film

Naoki IKEDA  Yoshimasa SUGIMOTO  Masayuki OCHIAI  Daijyu TSUYA  Yasuo KOIDE  Daisuke INOUE  Atsushi MIURA  Tsuyoshi NOMURA  Hisayoshi FUJIKAWA  Kazuo SATO  

IEICE TRANSACTIONS on Electronics   Vol.E95-C   No.2   pp.251-254
Publication Date: 2012/02/01
Online ISSN: 1745-1353
DOI: 10.1587/transele.E95.C.251
Print ISSN: 0916-8516
Type of Manuscript: BRIEF PAPER
surface plasmon resonance,  aluminum,  color filter,  electron beam lithography,  reactive ion etching,  

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We investigated optical transmission characteristics of aluminum thin films with periodic hole arrays in sub-wavelength. We divided white light into several color spectra using a color filter based on the surface plasmon resonance (SPR) utilizing aluminum showing high plasma frequency. By optimizing a hole-array period, hole shape, polarization and index difference of two surface, transmittance of 30% and full-width at half-maximum of around 100 nm were achieved.