Wavelength Trimming of Micro-Machined VCSELs

Hayato SANO  Norihiko NAKATA  Akihiro MATSUTANI  Fumio KOYAMA  

IEICE TRANSACTIONS on Electronics   Vol.E95-C   No.2   pp.237-242
Publication Date: 2012/02/01
Online ISSN: 1745-1353
DOI: 10.1587/transele.E95.C.237
Print ISSN: 0916-8516
Type of Manuscript: Special Section PAPER (Special Section on Photonic Devices using Nanofabrication Technology and Their Applications)
VCSEL,  MEMS,  wavelength trimming,  WDM,  optical Interconnects,  

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We demonstrate the wavelength trimming of MEMS VCSELs by etching a cantilever-shaped top mirror using FIB etching. The proposed technique can be used for the post-process precise wavelength allocation of athermal MEMS VCSELs. The modeling and experimental results on 850 nm MEMS VCSELs are presented. The results show a possibility of realizing both red-shift and blue-shift wavelength changes by choosing the etching area of the cantilever.