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Wavelength Trimming of Micro-Machined VCSELs
Hayato SANO Norihiko NAKATA Akihiro MATSUTANI Fumio KOYAMA
IEICE TRANSACTIONS on Electronics
Publication Date: 2012/02/01
Online ISSN: 1745-1353
Print ISSN: 0916-8516
Type of Manuscript: Special Section PAPER (Special Section on Photonic Devices using Nanofabrication Technology and Their Applications)
VCSEL, MEMS, wavelength trimming, WDM, optical Interconnects,
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We demonstrate the wavelength trimming of MEMS VCSELs by etching a cantilever-shaped top mirror using FIB etching. The proposed technique can be used for the post-process precise wavelength allocation of athermal MEMS VCSELs. The modeling and experimental results on 850 nm MEMS VCSELs are presented. The results show a possibility of realizing both red-shift and blue-shift wavelength changes by choosing the etching area of the cantilever.