A Novel Combined Proportional-Derivative Control for Electrostatic MEMS Mirror Actuation

Weiwei SHAN  Xin CHEN  

Publication
IEICE TRANSACTIONS on Electronics   Vol.E94-C   No.9   pp.1486-1489
Publication Date: 2011/09/01
Online ISSN: 1745-1353
DOI: 10.1587/transele.E94.C.1486
Print ISSN: 0916-8516
Type of Manuscript: BRIEF PAPER
Category: Electronic Instrumentation and Control
Keyword: 
MEMS micro-mirror,  electrostatic actuation,  closed-loop control,  

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Summary: 
In this brief paper, both static and dynamic behaviors of an electrostatic-actuated MEMS mirror are modeled and studied. To overcome the intrinsic pull-in problem and the dynamic disadvantages in the open-loop controlled actuation, a novel closed-loop feedback control method is proposed assuming the mirror tilt angle can be measured. First, a fixed voltage slightly higher than the pull-in voltage is applied when the mirror tilt angle is small. Then Proportional-Derivative (PD) control is used when the mirror is approaching the target position. Simulink simulation results show that this combined PD closed-loop control can overcome the pull-in problem and improve the dynamic behavior; furthermore, it can also enhance the robustness of the mirror actuation system to overcome environmental disturbances.