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A Novel Combined Proportional-Derivative Control for Electrostatic MEMS Mirror Actuation
Weiwei SHAN Xin CHEN
IEICE TRANSACTIONS on Electronics
Publication Date: 2011/09/01
Online ISSN: 1745-1353
Print ISSN: 0916-8516
Type of Manuscript: BRIEF PAPER
Category: Electronic Instrumentation and Control
MEMS micro-mirror, electrostatic actuation, closed-loop control,
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In this brief paper, both static and dynamic behaviors of an electrostatic-actuated MEMS mirror are modeled and studied. To overcome the intrinsic pull-in problem and the dynamic disadvantages in the open-loop controlled actuation, a novel closed-loop feedback control method is proposed assuming the mirror tilt angle can be measured. First, a fixed voltage slightly higher than the pull-in voltage is applied when the mirror tilt angle is small. Then Proportional-Derivative (PD) control is used when the mirror is approaching the target position. Simulink simulation results show that this combined PD closed-loop control can overcome the pull-in problem and improve the dynamic behavior; furthermore, it can also enhance the robustness of the mirror actuation system to overcome environmental disturbances.