Uncooled Infrared Radiation Focal Plane Array with Low Noise Pixel Driving Circuit

Risako UENO  Hiroto HONDA  Honam KWON  Koichi ISHII  Masako OGATA  Hitoshi YAGI  Ikuo FUJIWARA  Kazuhiro SUZUKI  Keita SASAKI  Hideyuki FUNAKI  

IEICE TRANSACTIONS on Electronics   Vol.E93-C   No.11   pp.1577-1582
Publication Date: 2010/11/01
Online ISSN: 1745-1353
DOI: 10.1587/transele.E93.C.1577
Print ISSN: 0916-8516
Type of Manuscript: INVITED PAPER (Special Section on Electronic Displays)
infrared,  focal plane array,  MEMS,  

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We have analyzed the dominant noise sources in the driving circuit of an uncooled infrared radiation focal plane array fabricated on a silicon-on-insulator (SOI) substrate by 0.35 µm CMOS technology and bulk- micromachining. We found no noise property of SOI-MOSFET inferior compared to those of NMOSs formed on SOI and bulk substrate, respectively. In addition, we reduced the total noise of the sensor chip by designing the current source NMOS sufficiently large, and optimized the operating current of pixel pn-junctions.